FT5 Series gas filters are made from selected materials and manufactured in compliance with high-cleanliness environment requirements, ensuring fluid purity and quality.

FT5 Series filters feature a filtration precision of 0.0025 µm.These filters use high-purity ceramic filter elements with a rating of 3 nm.The maximum working pressure is 20.7 MPa, and the filtration efficiency is ≥ 99.9999999%.Under  SEM imaging, the filter element consists of two membrane layers: an ultra-fine membrane layer and a fine membrane layer.They are suitable for gas filtration in various semiconductor processes.