Advances in electronic technology place ever higher demands on chips. XINVAL provides high-quality fluid system components and support to semiconductor tool manufacturers and chipmakers, helping them develop production processes and equipment, reduce life-cycle costs, and maintain safe fluid system operations.
The primary materials used are 316L, 316L VAR, and 316L VIM-VAR, which comply with SEMI F20 standards. The chemical composition, grain size, and other material properties are strictly controlled to ensure that the materials meet the requirements for High Purity (HP) and Ultra-High Purity (UHP) applications.
Utilizing 18.2 MΩ·cm electronic-grade ultrapure water, precision pre-cleaning is performed in a Class 1,000 cleanroom, followed by ultra-precision cleaning in a Class 100 cleanroom. The fully automated cleaning line ensures a stable and reliable cleaning process, meeting the ultra-high purity cleanliness requirements of SEMI E49.
All High Purity (HP) and Ultra-High Purity (UHP) grade valves are subjected to helium external and internal leak tests prior to shipment. The inboard leakage rate is ≤5×10⁻¹⁰ std cm³/s. The outboard leakage rate is ≤5×10⁻¹⁰ std cm³/s. The seat leakage rate is ≤1×10⁻⁹ std cm³/s.
We have Class 1,000 and Class 10 cleanrooms. The entire process of assembly, testing, and packaging is carried out in Class 1,000 or Class 10 cleanroom environments, minimizing the risk of secondary contamination and meeting the ultra-high purity cleanliness requirements of SEMI E49.
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