FT6 Series gas filters are made from selected materials and manufactured in compliance with high-cleanliness environment requirements, ensuring fluid purity and quality.

FT6 Series filters feature a filtration precision of 0.0025 µm. These filters use sintered metal filter elements with a rating of 3 nm.The maximum working pressure is 21.0 MPa, and the filtration efficiency is ≥ 99.9999999%. With an all-316L stainless steel compact structure, they can be applied under high-temperature and dynamic pressure conditions,and are suitable for gas filtration in various semiconductor processes.